There may be a certain bad sector in your CF card or HDD.
Check the bad sector and try it again

thanks.
I checked HDD by checkdisk and found nothing bad sector.
I tried to xcopy but error occured again.
I don't know how to check bad sectors in my CF card. Could you tell me how to do it?

You'd better try as below

1. Check the firmware version whether it is newest one or not.
if not newest, update firmware and try again
2. if not work, format the CF
3. Clean the CF by using memory card cleaning S/W such as [card wiper]
4. If you can't get this S/W, email us hajason@nextodi.com